Smart mems and sensor systems /

In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a unique systems perspective...

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Bibliographic Details
Main Author: Gaura, Elena
Corporate Author: Knovel (Firm)
Other Authors: Flewitt, Andrew, Kraft, Michael, Lima Monteiro, Davies William de, 1972-, Newman, Robert M
Format: Book
Language:English
Published: London : Imperial College Press, [2006], ©2006
London : ©2006
Series:Online access with JISC subscription agreement: Knovel
Catalogued Knovel SJ
Subjects:

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