Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry
Corporate Author: | |
---|---|
Other Authors: | |
Format: | Government Document Book |
Language: | English |
Published: |
[Washington, D.C. : Springfield, Va. :
National Aeronautics and Space Administration ; National Technical Information Service, distributor,
1996]
|
Series: | NASA technical memorandum
111685 |
Subjects: |