Fundamentals of microfabrication and nanotechnology /
"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si...
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, FL :
CRC Press,
[2012], ©2012
Boca Raton, FL : c2012 Boca Raton, FL : ©2012 Boca Raton, FL. : c2012 |
| Edition: | 3rd ed |
| Subjects: |
| LEADER | 16901nam a22021734a 4500 | ||
|---|---|---|---|
| 001 | db0547ad-c92d-4c5a-afe5-d0d2a47a3bc5 | ||
| 005 | 20240609000000.0 | ||
| 008 | 110519s2012 flua b 001 0 eng | ||
| 010 | |a 2011014406 |z 2011014404 |z 2011014405 | ||
| 010 | |a 2011014406 |z 2011014404 |z 2011014405 | ||
| 010 | |a 2011014406 | ||
| 010 | |a 2011014406 |z 2011014404 |z 2011014405 | ||
| 010 | |a ^^2011014406 |z ^^2011014404 |z ^^2011014405 | ||
| 015 | |a GBA8E1445 |2 bnb | ||
| 016 | 7 | |a 014857884 |2 Uk | |
| 019 | |a 751701536 |a 973218108 |a 975156769 | ||
| 019 | |a 751701536 | ||
| 020 | |a 0849331803 (set : hbk.) | ||
| 020 | |a 0849331803 (set) | ||
| 020 | |a 0849331803 |q (set) | ||
| 020 | |a 0849331803 | ||
| 020 | |a 1420055119 (v. 1 : hbk.) | ||
| 020 | |a 1420055119 (v. 1) | ||
| 020 | |a 1420055119 |q (v. 1) | ||
| 020 | |a 1420055119 |q v. 1 | ||
| 020 | |a 142005516X (v. 3 : hbk.) | ||
| 020 | |a 142005516X (v. 3) | ||
| 020 | |a 142005516X |q (v. 3) | ||
| 020 | |a 142005516X |q v. 3 | ||
| 020 | |a 1420055194 (v. 2 : hbk.) | ||
| 020 | |a 1420055194 (v. 2) | ||
| 020 | |a 1420055194 |q (v. 2) | ||
| 020 | |a 1420055194 |q v. 2 | ||
| 020 | |a 9780849331800 (set : hbk.) | ||
| 020 | |a 9780849331800 (set) | ||
| 020 | |a 9780849331800 |q (set) | ||
| 020 | |a 9780849331800 | ||
| 020 | |a 9781420055115 (v. 1 : hbk.) | ||
| 020 | |a 9781420055115 (v. 1) | ||
| 020 | |a 9781420055115 |q (v. 1) | ||
| 020 | |a 9781420055115 |q v. 1 | ||
| 020 | |a 9781420055160 (v. 3 : hbk.) | ||
| 020 | |a 9781420055160 (v. 3) | ||
| 020 | |a 9781420055160 |q (v. 3) | ||
| 020 | |a 9781420055160 |q v. 3 | ||
| 020 | |a 9781420055191 (v. 2 : hbk.) | ||
| 020 | |a 9781420055191 (v. 2) | ||
| 020 | |a 9781420055191 |q (v. 2) | ||
| 020 | |a 9781420055191 |q v. 2 | ||
| 024 | 8 | |a 848705 | |
| 029 | 1 | |a AU@ |b 000047484003 | |
| 029 | 1 | |a AU@ |b 000048529644 | |
| 029 | 1 | |a CHDSB |b 005941265 | |
| 029 | 1 | |a CHVBK |b 114619883 | |
| 029 | 1 | |a LQU |b 717118 | |
| 029 | 1 | |a NZ1 |b 13918743 | |
| 035 | |a (MCM)002169397MIT01 | ||
| 035 | |a (MdBJ)4052845 | ||
| 035 | |a (NNC)12186581 | ||
| 035 | |a (OCoLC)727047810 |z (OCoLC)751701536 |z (OCoLC)973218108 |z (OCoLC)975156769 | ||
| 035 | |a (OCoLC)727047810 |z (OCoLC)751701536 | ||
| 035 | |a (OCoLC)727047810 | ||
| 035 | |a (OCoLC)751701536 | ||
| 035 | |a (OCoLC)973218108 | ||
| 035 | |a (OCoLC)975156769 | ||
| 035 | |a (OCoLC)ocn727047810 | ||
| 035 | |a (OCoLC-I)755012225 | ||
| 035 | |a (OCoLC-M)488851923 | ||
| 035 | |a (RPB)b73174725-01bu_inst | ||
| 035 | |a 12186581 | ||
| 035 | |a 4052845 |9 ExL | ||
| 035 | |a 727047810 | ||
| 035 | |a 7950636 | ||
| 035 | |a NHCCYBP |b 99955484901 | ||
| 035 | |a ocn727047810 | ||
| 035 | |z (OCoLC)751701536 | ||
| 040 | |a DLC |b eng |c DLC |d YDX |d YDXCP |d CDX |d COO |d MYPMP |d IG# |d BDX |d YUS |d UKMGB |d PAU |d UTO |d IAD |d IOJ |d CUS |d TTU |d GTA |d IXA |d OCLCF |d CHVBK |d I8M |d MYUKM |d OCLCO |d QE2 |d OCLCQ |d CSJ |d TFW |d OCLCQ |d OCLCA | ||
| 040 | |a DLC |b eng |c DLC |d YDX |d YDXCP |d CDX |d COO |d MYPMP |d IG# |d BDX |d YUS |d UKMGB |d PAU |d UTO |d IAD |d IOJ |d CUS |d TTU |d GTA |d IXA |d OCLCF |d CHVBK |d I8M |d MYUKM |d OCLCO |d QE2 | ||
| 040 | |a DLC |b eng |c DLC |d YDX |d YDXCP |d CDX |d COO |d MYPMP |d IG# |d BDX |d YUS |d UKMGB |d PAU |d UTO |d IAD |d IOJ |d CUS |d TTU |d NIC | ||
| 040 | |a DLC |b eng |c DLC |d YDX |d YDXCP |d CDX |d COO |d MYPMP |d IG# |d BDX |d YUS |d UKMGB |d PAU |d UTO |d IAD |d IOJ |d CUS |d TTU |d OCLCO |d GTA |d IXA |d OCLCF |d OCLCQ |d CHVBK |d OCLCQ |d COO | ||
| 040 | |a DLC |b eng |c DLC |d YDX |d YDXCP |d CDX |d COO |d MYPMP |d IG# |d BDX |d YUS |d UKMGB |d PAU |d UTO |d IAD |d IOJ |d CUS |d TTU |d OCLCO |d GTA |d IXA |d OCLCF |d OCLCQ |d CHVBK |d OCLCQ | ||
| 040 | |a DLC |b eng |c DLC |d YDX |d YDXCP |d CDX |d COO |d MYPMP |d IG# |d BDX |d YUS |d UKMGB |d PAU |d UTO |d IAD |d IOJ |d CUS |d TTU |d OCLCO |d GTA |d IXA |d OCLCF |d OCLCQ |d CHVBK |d RBN |d NhCcYME |d RBN |d NhCcYME | ||
| 040 | |a UKM |c UKM |d CaONFJC | ||
| 042 | |a pcc | ||
| 049 | |a JHEE | ||
| 049 | |a MYGG | ||
| 049 | |a NDDP | ||
| 049 | |a RBNN | ||
| 050 | 4 | |a TK7836 |b .M33 2012 | |
| 050 | 0 | 0 | |a TK7875 |b .M33 2012 |
| 055 | 3 | |a TK7836 |b .M33 2012 | |
| 082 | 0 | 0 | |a 620/.5 |2 23 |
| 084 | |a TEC027000 |a TEC008070 |a SCI077000 |2 bisacsh | ||
| 090 | |f 1-SIZE |a TK7875 |b .M33 2012 | ||
| 100 | 1 | |a Madou, Marc J |0 http://viaf.org/viaf/sourceID/LC|n87888327 | |
| 100 | 1 | |a Madou, Marc J |e author. | |
| 100 | 1 | |a Madou, Marc J | |
| 245 | 1 | 0 | |a Fundamentals of microfabrication and nanotechnology / |c Marc J. Madou |
| 246 | 3 | 0 | |a Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology |
| 250 | |a 3rd ed | ||
| 260 | |a Boca Raton, FL : |b CRC Press, |c [2012], ©2012 | ||
| 260 | |a Boca Raton, FL : |b CRC Press, |c c2012 | ||
| 260 | |a Boca Raton, FL : |b CRC Press, |c ©2012 | ||
| 260 | |a Boca Raton, FL. : |b CRC Press, |c c2012 | ||
| 300 | |a 3 v. : |b ill. (chiefly col.) ; |c 29 cm | ||
| 300 | |a 3 v. : |b ill. (some col.) ; |c 29 cm | ||
| 300 | |a 3 volumes : |b illustrations (some color) ; |c 29 cm | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a unmediated |b n |2 rdamedia | ||
| 338 | |a volume |b nc |2 rdacarrier | ||
| 500 | |a Previous edition published as: Fundamentals of microfabrication. 2002 | ||
| 504 | |a Includes bibliographical references and index | ||
| 504 | |a Includes bibliographical references and indexes | ||
| 505 | 0 | |a CONTENTS v. 1 : -- Historical note: the ascent of silicon, MEMS, and NEMS -- Crystallography -- Quantum mechanics and the band theory of solids -- Silicon single crystal is still king -- Photonics -- Fluidics -- Electrochemical and optical analytical techniques | |
| 505 | 0 | |a CONTENTS v. 2 : -- pt. I, Lithography : -- Photolithography -- Next-generation lithographies and lithography research; -- pt. II, Pattern transfer with subtractive techniques : -- Dry etching -- Wet chemical etching and wet bulk micromachining- pools as tools -- Thermal energy-based removing -- Mechanicalenergy-based removing; -- pt. III, Pattern transfer with additive techniques : -- Physical and chemical vapor deposition- thin film properties and surface micromachining -- Chemical, photochemical, and electrochemical forming techniques -- Thermal energy-based forming techniques- thermoforming -- Micromolding techniques-LIGA | |
| 505 | 0 | |a CONTENTS v. 3 : -- pt. I, From manufacturing to nanotechnology : -- Nonlithography-based (traditional) and lithography-based (nontraditional) manufacturing compared -- Nature as an engineering guide: biomimetics -- Nanotechnology: top-down and bottom-up manufacturing approaches compared -- Packaging, assembly, and self-assembly -- Selected materials and processes for MEMS and NEMS -- Metrology and MEMS/NEMS modeling; -- pt. II, Scaling laws, actuators, and power and brains in miniature devices : -- Scaling laws -- Actuators -- Power and brains in miniature devices; -- pt. III, Miniaturization application : -- MEMS and NEMS applications | |
| 505 | 0 | |a V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications | |
| 505 | 0 | |a v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-NEMS, Manufacturing techniques and applications | |
| 505 | 0 | |a v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems : manufacturing techniques and applications | |
| 505 | 0 | 0 | |g v. 1: |t Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology. MEMS and NEMS foundations. Historical note : the ascent of silicon, MEMS, and NEMS -- |t Crystallography -- |t Quantum mechanics and the Band theory of solids -- |t Silicon single crystal is still king -- |t Photonics -- |t Fluidics -- |t Electrochemical and optical analytical techniques -- |g v. 2: |t Manufacturing techniques for microfabrication and nanotechnology. Lithography. Photolithography -- |t Next generation lithographics and lithography research -- |t Pattern transfer with subtractive techniques. Dry etching -- |t Wet chemical etchings and wet bulk micromachining : pools as tools -- |t Thermal energy based removing -- |t Mechanical energy based removing -- |t Pattern transfer with additive techniques. Physical and chemical vapor deposition : thin film properties and surface machining -- |t Chemical, photochemical, and electrochemical forming techniques -- |t Thermal energy based forming techniques : thermoforming -- |t Micromolding techniques : LIGA -- |g v. 3: |t From MEMS to Bio-MEMS and Bio-Nems, manufacturing techniques and applications. From traditional manufacturing to nanotechnology. Nonlithography based (traditional) and lithography based (nontraditional) manufacturing compared -- |t Nature as an engineering guide : biomimetics -- |t Nanotechnology : top down and bottom up manufacturing approaches compared -- |t Packaging, assembly, and self assembly -- |t Selected materials and processes for MEMS and NEMS -- |t Metrology and MEMS/NEMS modeling -- |t Scaling laws, actuators, and power and brains in miniature devices. Scaling laws -- |t Actuators -- |t Power and brains in miniature devices -- |t Miniaturization application. MEMS and NEMS applications |
| 520 | |a "In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"-- |c Provided by publisher | ||
| 520 | |a "Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"-- |c Provided by publisher | ||
| 596 | |a 3 | ||
| 650 | 0 | |a Integrated circuits |x Design and construction | |
| 650 | 0 | |a Lasers |x Industrial applications | |
| 650 | 0 | |a Machining | |
| 650 | 0 | |a Microelectromechanical systems |x Design and construction | |
| 650 | 0 | |a Microelectromechanical systems | |
| 650 | 0 | |a Microelectronics | |
| 650 | 0 | |a Microfluidics | |
| 650 | 0 | |a Nanoelectromechanical systems | |
| 650 | 0 | |a Nanotechnology | |
| 650 | 0 | |a Solid state physics | |
| 650 | 2 | |a Micro-Electrical-Mechanical Systems | |
| 650 | 2 | |a Microfluidics | |
| 650 | 4 | |a Física del estado sólido | |
| 650 | 4 | |a Microfluidos | |
| 650 | 4 | |a Sistemas microelectromecánicos | |
| 650 | 4 | |a Sistemas nanoelectromecánicos | |
| 650 | 7 | |a Microelectromechanical systems |2 fast | |
| 650 | 7 | |a Microfluidics |2 fast | |
| 650 | 7 | |a Mikrofertigung |2 gnd | |
| 650 | 7 | |a Nanoelectromechanical systems |2 fast | |
| 650 | 7 | |a Nanotechnologie |2 gnd | |
| 650 | 7 | |a SCIENCE |x Solid State Physics |2 bisacsh | |
| 650 | 7 | |a Solid state physics |2 fast | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Electronics |x Microelectronics |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Nanotechnology & MEMS |2 bisacsh | |
| 700 | 1 | |a Madou, Marc J |t Fundamentals of microfabrication. | |
| 740 | 0 | 2 | |a From MEMS to Bio-MEMS and Bio-Nems, manufacturing techniques and applications |
| 740 | 0 | 2 | |a Manufacturing techniques for microfabrication and nanotechnology |
| 740 | 0 | 2 | |a Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology |
| 776 | 1 | |w (OCoLC)908077731 | |
| 999 | 1 | 0 | |i db0547ad-c92d-4c5a-afe5-d0d2a47a3bc5 |l a9250331 |s US-CST |m fundamentals_of_microfabrication_and_nanotechnology________________________2012____3__crcpra________________________________________madou__marc_j______________________p |
| 999 | 1 | 0 | |i db0547ad-c92d-4c5a-afe5-d0d2a47a3bc5 |l 990021693970106761 |s US-MCM |m fundamentals_of_microfabrication_and_nanotechnology________________________2012____3__crcpra________________________________________madou__marc_j______________________p |
| 999 | 1 | 0 | |i db0547ad-c92d-4c5a-afe5-d0d2a47a3bc5 |l 991038840559707861 |s US-MDBJ |m fundamentals_of_microfabrication_and_nanotechnology________________________2012____3__crcpra________________________________________madou__marc_j______________________p |
| 999 | 1 | 0 | |i db0547ad-c92d-4c5a-afe5-d0d2a47a3bc5 |l 990147565900203941 |s US-MH |m fundamentals_of_microfabrication_and_nanotechnology________________________2012____3__crcpra________________________________________madou__marc_j______________________p |
| 999 | 1 | 0 | |i db0547ad-c92d-4c5a-afe5-d0d2a47a3bc5 |l 006604573 |s US-NCD |m fundamentals_of_microfabrication_and_nanotechnology________________________2012____3__crcpra________________________________________madou__marc_j______________________p |
| 999 | 1 | 0 | |i db0547ad-c92d-4c5a-afe5-d0d2a47a3bc5 |l 7950636 |s US-NIC |m fundamentals_of_microfabrication_and_nanotechnology________________________2012____3__crcpra________________________________________madou__marc_j______________________p |
| 999 | 1 | 0 | |i db0547ad-c92d-4c5a-afe5-d0d2a47a3bc5 |l 12186581 |s US-NNC |m fundamentals_of_microfabrication_and_nanotechnology________________________2012____3__crcpra________________________________________madou__marc_j______________________p |
| 999 | 1 | 0 | |i db0547ad-c92d-4c5a-afe5-d0d2a47a3bc5 |l 991019448549706966 |s US-RPB |m fundamentals_of_microfabrication_and_nanotechnology________________________2012____3__crcpra________________________________________madou__marc_j______________________p |
| 999 | 1 | 1 | |l a9250331 |s ISIL:US-CST |t BKS |a ENG STK-NOCIRC |b 36105217211767 |c TK7836 .M33 2012 V.1 |d LC |x NH-INHOUSE |y 36105217211767 |p UNLOANABLE |
| 999 | 1 | 1 | |l a9250331 |s ISIL:US-CST |t BKS |a ENG STK-NOCIRC |b 36105217211783 |c TK7836 .M33 2012 V.3 |d LC |x NH-INHOUSE |y 36105217211783 |p UNLOANABLE |
| 999 | 1 | 1 | |l a9250331 |s ISIL:US-CST |t BKS |a ENG STK-NOCIRC |b 36105217211775 |c TK7836 .M33 2012 V.2 |d LC |x NH-INHOUSE |y 36105217211775 |p UNLOANABLE |
| 999 | 1 | 1 | |l 990021693970106761 |s ISIL:US-MCM |t BKS |a ENG STACK |b 39080036595392 |c TK7875.M33 2012 |d 0 |x BOOK |y 23502738850006761 |p LOANABLE |
| 999 | 1 | 1 | |l 990021693970106761 |s ISIL:US-MCM |t BKS |a ENG STACK |b 39080036595400 |c TK7875.M33 2012 |d 0 |x BOOK |y 23502738840006761 |p LOANABLE |
| 999 | 1 | 1 | |l 990021693970106761 |s ISIL:US-MCM |t BKS |a ENG STACK |b 39080036595384 |c TK7875.M33 2012 |d 0 |x BOOK |y 23502738830006761 |p LOANABLE |
| 999 | 1 | 1 | |l 991038840559707861 |s ISIL:US-MDBJ |t BKS |a LSC shmoffs |b 31151029143066 |c TK7875.M33 2012 QUARTO |d 0 |g v. 1 |x jhbooks |y 23375681910007861 |p LOANABLE |
| 999 | 1 | 1 | |l 991038840559707861 |s ISIL:US-MDBJ |t BKS |a LSC shmoffs |b 31151029142969 |c TK7875.M33 2012 QUARTO |d 0 |g v. 3 |x jhbooks |y 23375681880007861 |p LOANABLE |
| 999 | 1 | 1 | |l 991038840559707861 |s ISIL:US-MDBJ |t BKS |a LSC shmoffs |b 31151029143546 |c TK7875.M33 2012 QUARTO |d 0 |g v.2 |x jhbooks |y 23375681900007861 |p LOANABLE |
| 999 | 1 | 1 | |l 990147565900203941 |s ISIL:US-MH |t BKS |a CAB GEN |b 32044107393886 |c TK7875 .M33 2012 |d 0 |x 01 BOOK |y 232179183060003941 |p UNLOANABLE |
| 999 | 1 | 1 | |l 990147565900203941 |s ISIL:US-MH |t BKS |a CAB GEN |b 32044107393902 |c TK7875 .M33 2012 |d 0 |x 01 BOOK |y 232179183040003941 |p UNLOANABLE |
| 999 | 1 | 1 | |l 990147565900203941 |s ISIL:US-MH |t BKS |a CAB GEN |b 32044107393894 |c TK7875 .M33 2012 |d 0 |x 01 BOOK |y 232179183050003941 |p UNLOANABLE |
| 999 | 1 | 1 | |l 006604573 |s ISIL:US-NCD |t BKS |a PERKN PK |b D04902644T |c TK7875 .M33 2012 |d 0 |x BOOK |y 007403118 |p LOANABLE |
| 999 | 1 | 1 | |l 006604573 |s ISIL:US-NCD |t BKS |a PERKN PK |b D04902645U |c TK7875 .M33 2012 |d 0 |x BOOK |y 007403118 |p LOANABLE |
| 999 | 1 | 1 | |l 006604573 |s ISIL:US-NCD |t BKS |a PERKN PK |b D04902646V |c TK7875 .M33 2012 |d 0 |x BOOK |y 007403118 |p LOANABLE |
| 999 | 1 | 1 | |l 006604573 |s ISIL:US-NCD |t BKS |a DKU DK |b K00013179L |c TK7875 .M33 2012 |d 0 |x BOOK |y 006604573 |p UNLOANABLE |
| 999 | 1 | 1 | |l 006604573 |s ISIL:US-NCD |t BKS |a DKU DK |b K00013180D |c TK7875 .M33 2012 |d 0 |x BOOK |y 006604573 |p UNLOANABLE |
| 999 | 1 | 1 | |l 006604573 |s ISIL:US-NCD |t BKS |a DKU DK |b K00013181E |c TK7875 .M33 2012 |d 0 |x BOOK |y 006604573 |p UNLOANABLE |
| 999 | 1 | 1 | |l 7950636 |s ISIL:US-NIC |t BKS |a uris |b 31924118151590 |c Oversize TK7875 .M33 2012 + |d lc |k 1 |v v.3 |x Book |y 8d5f36a7-1d06-4a23-97cd-aca3dd9f2d74 |p LOANABLE |
| 999 | 1 | 1 | |l 12186581 |s ISIL:US-NNC |t BKS |a sci |b 0076114830 |c TK7875 .M33 2012 |v v.3 |y 9023010 |p LOANABLE |
| 999 | 1 | 1 | |l 991019448549706966 |s ISIL:US-RPB |t BKS |a SCIENCE STACKS |b 31236105163680 |c 1-SIZE TK7875 .M33 2012 |d 0 |y 23287976720006966 |p LOANABLE |
| 999 | 1 | 1 | |l 991019448549706966 |s ISIL:US-RPB |t BKS |a SCIENCE STACKS |b 31236095256148 |c 1-SIZE TK7875 .M33 2012 |d 0 |y 23287976740006966 |p LOANABLE |
| 999 | 1 | 1 | |l 991019448549706966 |s ISIL:US-RPB |t BKS |a SCIENCE STACKS |b 31236099751599 |c 1-SIZE TK7875 .M33 2012 |d 0 |y 23287976730006966 |p LOANABLE |