Fundamentals of microfabrication and nanotechnology /

Fundamentals of microfabrication and nanotechnology /

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"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si...

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Bibliographic Details
Main Author: Madou, Marc J (Author)
Format: Book
Language:English
Published: Boca Raton, FL : CRC Press, [2012], ©2012
Boca Raton, FL : c2012
Boca Raton, FL : ©2012
Boca Raton, FL. : c2012
Edition:3rd ed
Subjects:
Integrated circuits > Design and construction
Lasers > Industrial applications
Machining
Microelectromechanical systems > Design and construction
Microelectromechanical systems
Microelectronics
Microfluidics
Nanoelectromechanical systems
Nanotechnology
Solid state physics
Micro-Electrical-Mechanical Systems
Física del estado sólido
Microfluidos
Sistemas microelectromecánicos
Sistemas nanoelectromecánicos
Mikrofertigung
Nanotechnologie
SCIENCE > Solid State Physics
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics
TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS

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