Advanced high Tc ferroelectrics /
Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. Electromechanical actuators directly transform input electrical energy into mechanical energy. Piezoelectric and e...
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| Format: | Book |
| Language: | English |
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New York :
Nova Publishers,
[2013]
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| Series: | Physics research and technology
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| Subjects: |
Internet
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INTERNET RESOURCE |
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