Perkin-Elmer 544 Overlay Evaluation Using Statistical Techniques /

Perkin-Elmer 544 Overlay Evaluation Using Statistical Techniques /

A recently developed optical overlay measurement system is used to perform factorial design statistical experiments on the Perkin-Elmer 544 Micralign. The overlay measurement system (Perkin-Elmer's OMS-1) is used to check out the operation of computer offsets and microstage scale corrections in...

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Bibliographic Details
Main Authors: Babasick, RF (Author), Keller, GA (Author), Waldo, WG (Author)
Corporate Authors: ASTM International, American Society for Testing and Materials
Format: Book
Language:English
Published: West Conshohocken, Pa. : ASTM International, 1989
Subjects:
Capability
Factorial
Gauge
Overlay
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