Fundamentals of microfabrication : the science of miniaturization /

Fundamentals of Microfabrication explores the science of miniaturization, including its methods and materials, from the historical to the state-of-the-art. The bestselling first edition met success not only with researchers and engineers, but also in advanced undergraduate and graduate classrooms ar...

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Bibliographic Details
Main Author:	Madou, Marc J
Format:	Book
Language:	English
Published:	Boca Raton : CRC Press, c2002 Boca Raton : ©2002 Boca Raton, FL : c2002 Boca Raton, Fla. : [2002], ©2002 Boca Raton, Fla. : c2002
Edition:	2nd ed
Subjects:	Integrated circuits > Design and construction Lasers > Industrial applications Machining Microelectromechanical systems > Design and construction Microelectronic packaging Microelectronics Miniaturization Encapsulamento eletrônico Laser (aplicações industriais) Microelectromechanical systems Microeletrônica

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