Thin silicon dioxide films grown on silicon by low temperature plasma anodization and rapid thermal processing : an electro-structural analysis /

Bibliographic Details
Main Author:	Nelson, Scott Alan, 1961-
Format:	Thesis Book
Language:	English
Published:	1988
Subjects:	Silica Silicon Thin films > Electric properties

Holdings details from Cornell University
Call Number:	Thesis 1988 N431 Thesis QC10 1988 N431

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