Fundamentals of microelectromechanical systems (MEMS) /
This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and...
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| Format: | Book |
| Language: | English |
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New York :
McGraw Hill,
[2021]
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