Enabling technology for MEMS and nanodevices /

Enabling technology for MEMS and nanodevices /

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applicati...

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Bibliographic Details
Other Authors: Baltes, H (Henry)
Format: Book
Language:English
Published: Weinheim : Wiley-VCH, c2004
Weinheim [Germany] : c2004
Weinheim [Germany] : ©2004
Weinheim : [2004]
Series:Advanced micro & nanosystems ; v. 1
Advanced micro & nanosystems ; v. 1
Subjects:
Microelectromechanical systems
Microelectronics
Nanotechnology
Microelectrónica
Nanotecnología
Sistemas microelectromecánicos

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Stanford University

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Call Number: TK7875 .E53 2004

Yale University

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Massachusetts Institute of Technology

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Duke University

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University of Pennsylvania

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Brown University

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Call Number: TK7875 .E53x 2004

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