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Li, Kecheng (Doctor of Philosophy, Harvard University, 2016)
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Li, Kecheng (Doctor of Philosophy, Harvard University, 2016)
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Direct Liquid Evaporation Chemical Vapor Deposition(DLE-CVD) of Nickel, Manganese and Copper-Based Thin Films for Interconnects in Three-Dimensional Microelectronic Systems
by
Li
,
Kecheng
(
Doctor
of
Philosophy
,
Harvard
University
,
2016
)
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