Showing 1 - 20 results of 46 for search '"etcher"', query time: 0.45s Refine Results
  1. 1
    An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher /
    by Gower, Aaron E (Aaron Elwood)
    Published 1996

    This item is not available through BorrowDirect. Please contact your institution’s interlibrary loan office for further assistance.
    Thesis Book
  2. 2
    Etching characteristics and profile control in a time multiplexed inductively coupled plasma etcher /
    Published 1998

    This item is not available through BorrowDirect. Please contact your institution’s interlibrary loan office for further assistance.
    Book
  3. 3
    In-situ depth monitoring for a deep reactive ion etcher using a white light interferometer with active vibration cancellation /
    by Teale, Carson (Carson Arthur)
    Published 2019

    This item is not available through BorrowDirect. Please contact your institution’s interlibrary loan office for further assistance.
    Thesis Book
  4. 4
    Silk screen methods of reproduction for sign painters, card writers, display men, furniture decorators, novelty manufacturers, glass etchers and for domestic use,
    by Zahn, Bert, Zahn, Bert
    Published 1939

    Book
  5. 5
    Photographic and optical electric lamps /
    by Kennedy, Rankin, -1917
    Published 1895

    This item is not available through BorrowDirect. Please contact your institution’s interlibrary loan office for further assistance.
    Book
  6. 6
    Plasma etching : fundamentals and applications /
    by Sugawara, M (Minoru)
    Published 1998
    Table of Contents: “...Magnetic field coupled etchers /...”

    Book
  7. 7
    1999 4th International Symposium on Plasma Process-Induced Damage : May 9-11, 1999, Monterey, California, USA /
    Published 1999
    Table of Contents: “...Minimizing Charge-Up Damage During Dielectric Etchers' Hardware and Process Development Stages /...”

    Conference Proceeding Book
  8. 8
    Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes /
    Published 1998
    Table of Contents: “...]) in a Decoupled Plasma Source Etcher /...”

    Conference Proceeding Book
  9. 9
    Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing /
    Published 1997
    Table of Contents: “...Run-to-Run Process Control on a Dual-Coil Transformer Coupled Plasma Etcher with Full Wafer...”

    Conference Proceeding Book
  10. 10
    Process, equipment, and materials control in integrated circuit manufacturing III : 1-2 October, 1997, Austin, Texas /
    Published 1997
    Table of Contents: “...Microcontamination control in a Lam 4400 plasma etcher: 15X reduction in particle defect densities...”

    Book
  11. 11
    3D IC stacking technology /
    Published 2011
    Table of Contents: “...RIE and Early Etchers --...”

    Book
  12. 12
    Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas /
    Published 1995
    Table of Contents: “...Optical studies of fluorocarbon film formation by a high-density plasma etcher /...”

    Book
  13. 13
    Proceedings of the Symposium on Interconnect and Contact Metallization /
    Published 1998
    Table of Contents: “...Etching of TiN/AlSiCu/W/TiW Metal Interconnect Stack with a single Chamber Etcher /...”

    Conference Proceeding Book
  14. 14
    1998 3rd International Symposium on Plasma Process-Induced Damage : June 4-5, 1998, Honolulu, Hawaii, USA /
    Published 1998
    Table of Contents: “...Impact of Etcher Chamber Design on Plasma Induced Device Damage for Advanced Oxide Etching /...”

    Conference Proceeding Book
  15. 15
    Process, equipment, and materials control in integrated circuit manufacturing IV : 22-24 September, 1998, Santa Clara, California /
    Published 1998
    Table of Contents: “... coupled plasma chemical etcher /...”

    Book
  16. 16
    Proceedings of the Seventh International Symposium on Silicon-on-Insulator Technology and Devices /
    Published 1996
    Table of Contents: “...Deep trench isolation in bonded wafer SOI ICs using high density ICP etcher /...”

    Conference Proceeding Book
  17. 17
    Plasma etching processes for sub-quarter micron devices : proceedings of the International Symposium /
    Published 2000
    Table of Contents: “...Magnetically Enhanced Dual Frequency Reactive Ion Etcher for Dielectric Etching /...”

    Conference Proceeding Book
  18. 18
    Microelectronics technology and devices, SBMICRO 2004 : proceedings of the nineteenth international symposium /
    Published 2004
    Table of Contents: “...Selective etching of polycrystalline silicon in a hexode type plasma etcher /...”

    This item is not available through BorrowDirect. Please contact your institution’s interlibrary loan office for further assistance.
    Conference Proceeding Book
  19. 19
    2002 7th International Symposium on Plasma- and Process-Induced Damage : June 5-7, 2002, Maui, Hawaii, USA /
    Published 2002
    Table of Contents: “...Utility of CHARM-2 in Diagnosing Sources of Plasma Charging Damage in High Density Etchers...”

    Conference Proceeding Book
  20. 20
    Proceedings of the 2001 8th International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA 2001 : [9-13 July, 2001, the Westin Stamford & Westin Plaza, Singapore] /
    Published 2001
    Table of Contents: “...The Reactive Ion Etcher as a Physical and Failure Analysis Tool for FC-PGA Packages /...”

    Conference Proceeding Book
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