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|a MOEMS display and imaging systems III :
|b 24-25 January 2005, San Jose, California, USA /
|c Hakan Ürey, David L. Dickensheets, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA)
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|a Bellingham, Wash., USA :
|b SPIE,
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|a Bellingham, Wash., USA :
|b SPIE,
|c c2005
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|a 1 online resource (xli, 214 p.) :
|b ill
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|a xli, 214 p. :
|b ill. ;
|c 28 cm
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|a Proceedings of SPIE ;
|v v. 5721
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1 |
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|a Proceedings of SPIE,
|x 0277-786X ;
|v v. 5721
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|a Description based on print version record
|
| 504 |
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|a Includes bibliographical references and author index
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| 506 |
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|a License restrictions may limit access
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| 530 |
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|a Also available online via the World Wide Web; access restricted to licensed sites/users
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|a Description based on print version record
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0 |
|a Imaging systems
|x Design and construction
|v Congresses
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| 650 |
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0 |
|a Microelectromechanical systems
|v Congresses
|
| 650 |
|
0 |
|a Optics, Adaptive
|v Congresses
|
| 650 |
|
0 |
|a Scanning systems
|x Design and construction
|v Congresses
|
| 650 |
|
7 |
|a Imaging systems
|2 fast
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| 650 |
|
7 |
|a Imaging systems
|x Design and construction
|2 fast
|
| 650 |
|
7 |
|a Microelectromechanical systems
|2 fast
|
| 650 |
|
7 |
|a Optics, Adaptive
|2 fast
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| 650 |
|
7 |
|a Scanning systems
|2 fast
|
| 650 |
|
7 |
|a Scanning systems
|x Design and construction
|2 fast
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|a Conference papers and proceedings
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|a Conference papers and proceedings
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|a Dickensheets, David L
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|a Urey, Hakan,
|d 1970-
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|a Sandia National Laboratories
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2 |
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|a Semiconductor Equipment and Materials International
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2 |
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|a Society of Photo-optical Instrumentation Engineers
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|a Solid State Technology (Organization)
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|i Print version:
|t MOEMS display and imaging systems III
|d Bellingham, Wash., USA : SPIE, c2005
|z 0819456950
|w (DLC) 2005296018
|w (OCoLC)ocm59143476
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