RF sputtered silicon and hafnium nitrides as applied to 440C steel

Bibliographic Details
Main Author: Grill, Alfred
Corporate Author: Lewis Research Center
Other Authors: Aron, Paul R
Format: Government Document Book
Language:English
Published: Cleveland, Ohio : Lewis Research Center, [1984]
Series:NASA technical memorandum 86862
Subjects:

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Stanford University

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Call Number: ISIL:US-CST
MARCIVE
NAS 1.15:86862